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PROBING SOLUTIONS

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EverBeing General Catalogue

 

Probe Stations  *  Micropositioners  *  Probing Accessories

 

As a global supplier of probing solutions, EverBeing provides a complete range of probing hardware from A to Z. In partnership with Vicom, we are your one-stop shop for probing solutions!

We have complete probe stations, as well as semi-finished parts in stock at the factory. In addition, we have one of the widest range of probing systems accessories available including probing tips, tip holders, extension cables, triaxial/RF heads/adapters, micropositioners and microscopes. As a result, as soon as a customer order is received, EverBeing can rapidly configure, assemble and ship that order to Vicom and on to you.

With over 25 years experience, EverBeing and Vicom consultants cost-effectively materialize your idea. If you are unable to find the proper items from our standard product line, we will gladly tailor to your specific needs. In addition, we offer upgrades and services for existing probe stations of any brand and model.


Probe Stations

BD Series Analytical Probe Stations

EverBeing BD8 Wafer Probing Station

Features:

  • Large knob chuck stage
  • RF probing field upgradeable
  • 20X ~ 4000X magnification
  • Backlash-free movement
  • Platen linear quick up/down for easy load / unload of wafer
  • Choice of microscope up / down tilt for E-Z revolving objectives

 

Specifications:

  • Vacuum Chuck : see model table below
  • Chuck Stage Travel: see model table below
  • Chuck Theta : 0~30 degrees
  • Platen Up/ Down Coarse Adjustment : 6mm Adjustable Lever-Driven
  • Platen Up/Down Fine Adjustment: 25 mm Adjustable Hand Wheel-Driven
  • Platen: 12 Micropositioners
  • Microscope Stage: 1" x1" Travel

 

Model

Vacuum Chuck

Chuck Stage Travel

Datasheet

BD-6

6" stainless steel

6" x 6"

View Datasheet

BD-8

8" stainless steel

8" x 8"

View Datasheet

BD-12

12" stainless steel

12" x 12"

View Datasheet

 


EB Series Analytical Probe Stations

EverBeing EB8 Wafer Probing Station

Features:

  • Coaxial driven chuck stage
  • RF probing field upgradeable
  • 20X ~ 4000X magnification
  • Backlash-free movement
  • Choice of microscope up / down tilt for E-Z revolving objectives

 

Specifications:

    • Vacuum Chuck : see model table below
    • Chuck Stage Travel: see model table below
    • Chuck Theta : 0~30 degrees
    • Chuck Up/Down: 4 mm Adjustable
    • Platen: 12 Micropositioners
    • Microscope Stage: 1" x1" Travel

Model

Vacuum Chuck

Chuck Stage Travel

Datasheet

EB-6

6" stainless steel

6" x 6"

View Datasheet

EB-8

8" stainless steel

8" x 8"

View Datasheet

EB-12

12" stainless steel

12" x 12"

View Datasheet


C-2 Mini Probe Station

EverBeing C-2 Mini Probe Station

Features:

  • Compact size & light weight
  • Affordable
  • Coaxial driven chuck stage
  • Electro-optics applications - light intensity / wavelength
  • Measurement for LED / LD / PD 
  • RF Probing East-West

Specifications:

      • Vacuum Chuck : 2" stainless steel
      • Chuck Stage Travel: 2" x 2"
      • Resolution: 10 micron
      • Chuck Theta : 0~30 degrees

View Datasheet


PE-4 Mini Probe Station

EverBeing PE-4 Mini Probe Station

Features:

  • Coaxial driven chuck stage
  • RF probing field upgradeable
  • 20X ~ 4000X magnification
  • Backlash-free movement
  • Choice of microscope up / down tilt for E-Z revolving objectives

Specifications:

      • Vacuum Chuck : 4" stainless steel
      • Chuck Stage Travel: 3" x 3"
      • Chuck Theta : 0~30 degrees
      • Platen: 6 Micropositioners

View Datasheet


CG-196 Cryogenics (& High Temperature, Oxygen Free) Probe Station

EverBeing CG-196 Cryogenics Probe Station

Features:

  • Rugged structure with all-welded frame
  • Tip repositioning using external micropositioner
  • Bridged frame microscope with easily opening chamber
  • Precise microscope X-Y movement
  • Up to 6 micropositioners at one time
  • Optional 10pA leakage level
  • Optional vibration-free table
  • Optional high vacuum chamber

CG-196 Probe Station Applications:

1. Cryogenics:

Because the wafer is probed at the cryogenics temperature, moisture will form and then freeze on the wafer. This moisture will result in electrical leakage which causes a measurement failure. With the CG-196 Probe Station, the moisture in the chamber is removed by the vacuum pump which has to be kept running for the duration of the measurements.

2. High Temperature, Oxygen-Free:

When the wafer is heated to 300 degrees C, 400 degrees C, 500 degrees C and higher, significant oxidation will occur. The higher the temperature, the greater the oxidation of the wafer surface.The oxidation will make the wafer degrade electrically, physically & mechanically. With the CG-196, the oxygen in the chamber is removed by the vacuum pump which must be kept running throughout the measurement cycle.

Because the chuck will be controlled thermally for both the cryogenics and high temperature applications, the probed tip on the wafer will shift somewhat as a result of the wafer shrinkage and expansion. This results in some of the tips have\ing to be re-positioned by the micropositioner using the control knobs, X-Y-Z, ouside the vacuum chamber. Alternatively, the motorized micropositioner with the joystick control panel outside can easiuly re-position the tip in the chamber.

Specifications:

      • Chuck : 400mm dia
      • Temperature range 77 degrees K - 480 degrees K
      • Temperature resolution: 0.1 degrees K
      • Liquid nitrogen dewar: 50 litre
      • Micropositioner travel, X-Y-Z linear: 22mm x 25mm x 25mm, resolution 10 micron
      • Microscope X-Y stage: 1" x 1"
        • Zoom: 0.7X~4.5X
        • Eyepiece: 20X
        • Total maginification: 14X~90X
        • Light box: 150w, stepless control
        • Dual gooseneck fibre optic guide
        • Leveling leg, 4 sets

View Datasheet


SR-4 4-Point Probe Stand (for Sheet Resistivity Measurements)

EverBeing PE-4 Mini Probe Station

Features:

  • True vertical up / down
  • Individual contact spring-loaded pin
  • Constant pin spacing
  • Ultimate repeatability
  • Probe head easy changeover
  • Probing Z position adjustable from top
  • Sturdy feedthrough rear panel
  • Feedthrough connector choice of banana / BNC / Triaxial
  • Chuck quick move available
  • Hot chuck available
  • Shielding box available
  • 3rd-party probe heads available

SR-4 Applications:

      • Sheet Resistivity
      • Slice Resistivity
      • Doping Quality
      • Metalization Thickness
      • P/N Typing
      • V/I Measurement

Specifications:

      • Chuck: 4", 6", 8" dia. teflon
      • Head up/down movement: 10mm
      • Probing Z resolution: 1 Micron
      • Probe pin material: tungsten carbide
      • Probe pin spacing: 40 mil, 50 mil, 62.5 mil
      • Probe pin spring: 45grams, 85grams, 180grams
      • Probe pin radius: 40.6 micron

View Datasheet


 

Other Probe Stations

* LCD (Large Sized Substrate) Probe Station

* Hall-Effect Probe Station

Contact us for more information

 


Micropositioners

EB-700 I/O Pad Electro-optics Micropositioner

EverBeing EB-700 Micropositioner

Features:

  • Budget-priced and affordable
  • Linear motion
  • I/O pad probing
  • Electro-optics probing
  • Space saving
  • Choice of triaxial / coaxial tip holders

Specifications:

      • X-Y-Z positioning range: 12mm x 12mm x 12mm, Linear motion
      • Lead screw thread count: 40 TPI
      • Resolution: 1.7 micron

View Datasheet


EB-050 Circuit / RF Micropositioner

EverBeing EB-700 Micropositioner

Features:

  • Linear motion
  • I/O pad probing
  • Circuit probing
  • RF probing
  • Space saving, in-line X-Y Knob
  • Choice of triaxial / coaxial tip holders

Specifications:

      • X-Y-Z positioning range: 12mm x 12mm x 12mm, Linear motion
        Lead screw thread count: 80 TPI
        Resolution: 0.8 micron

View Datasheet


EB-005 Sub-micron / RF Micropositioner

EverBeing EB-005 Micropositioner

Features:

  • Sub-micron internal circuit probing
  • Linear motion
  • Backlash-free movement
  • Choice Of triaxial / coaxial tip holders
  • Four-sided RF probe positioner
    • East/West/South/North
  • DC to 40GHz ~ 120GHz
  • Multi-contact wedge DC to 40GHz or 67GHz
  • Calibration substrate with software
  • 45 degree cable connection
    • no need for elbow connector
  • 30 degree E-Z probing inclination
  • Repairable probe head
  • Tungsten tip available
  • Positioner with cable holder

Specifications:

      • X-Y-Z positioning range: 12mm x 12mm x 12mm, Linear motion
      • Lead screw thread count: 200 TPI
      • Resolution: 0.35 micron

View Datasheet


Accessories

EverBeing Probing Accessories Probing solutions require not only probe stations and micropositioners but, in fact, a full range of accessories to build each customised solution.

 

 
  • Probe tips
 
 
  • Tip holders
 
 
  • Tri-axial / coaxial cable assemblies
 
 
  • Tri-axial / BNC cable adapters
 

 

  • Other RF cables
 
 
  • RF Head / DC BIAS calibration substrate
 
 
  • Microscope and objective
 
 
  • Vacuum pump
 
 
  • Hot chuck
 
 
  • Sheet resistivity stand
 
 
  • Shielded box
 
 
  • Tester shell
 
 
  • Vibration-free table
 
 
  • Vibration-free tabletop
 

 

For further information, Contact Us at Vicom to speak to one of our technical specialists