Probing Solutions |
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Your source for probing solutions
Wherever, Whatever, Better by Design!
As a global supplier of probing solutions, EverBeing provides a complete range of probing hardware from A to Z. In partnership with Vicom, we are your one-stop shop for probing solutions!
We have complete probe stations, as well as semi-finished parts in stock at the factory. In addition, we have one of the widest range of probing systems accessories available including probing tips, tip holders, extension cables, triaxial/RF heads/adapters, micropositioners and microscopes. As a result, as soon as a customer order is received, EverBeing can rapidly configure, assemble and ship that order to Vicom and on to you.
With over 25 years experience, EverBeing and Vicom consultants cost-effectively materialize your idea. If you are unable to find the proper items from our standard product line, we will gladly tailor to your specific needs. In addition, we offer upgrades and services for existing probe stations of any brand and model.
Probe Stations
BD Series Analytical Probe Stations
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Features:
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Specifications:
- Vacuum Chuck : see model table below
- Chuck Stage Travel: see model table below
- Chuck Theta : 0~30 degrees
- Platen Up/ Down Coarse Adjustment : 6mm Adjustable Lever-Driven
- Platen Up/Down Fine Adjustment: 25 mm Adjustable Hand Wheel-Driven
- Platen: 12 Micropositioners
- Microscope Stage: 1" x1" Travel
Model |
Vacuum Chuck |
Chuck Stage Travel |
Datasheet |
BD-6 |
6" stainless steel |
6" x 6" |
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BD-8 |
8" stainless steel |
8" x 8" |
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BD-12 |
12" stainless steel |
12" x 12" |
EB Series Analytical Probe Stations
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Features:
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Specifications:
- Vacuum Chuck : see model table below
- Chuck Stage Travel: see model table below
- Chuck Theta : 0~30 degrees
- Chuck Up/Down: 4 mm Adjustable
- Platen: 12 Micropositioners
- Microscope Stage: 1" x1" Travel
Model |
Vacuum Chuck |
Chuck Stage Travel |
Datasheet |
EB-6 |
6" stainless steel |
6" x 6" |
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EB-8 |
8" stainless steel |
8" x 8" |
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EB-12 |
12" stainless steel |
12" x 12" |
C-2 Mini Probe Station
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Features:
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C-2-RF Mini Probe Station
Introducing the worlds smallest, yet reliable RF probe station. This versatile 2” probe station for RF measurements with convenience features built in is capable of full four-port measurements with two DC biasing positioners.
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Features:
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Specifications:
- Vacuum Chuck : 2" stainless steel
- Chuck Stage Travel: 2" x 2"
- Resolution: 10 micron
- Chuck Theta : 0~30 degrees
PE-4 Mini Probe Station
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Features:
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Specifications:
- Vacuum Chuck : 4" stainless steel
- Chuck Stage Travel: 3" x 3"
- Chuck Theta : 0~30 degrees
- Platen: 6 Micropositioners
CG-196 Cryogenics (& High Temperature, Oxygen Free) Probe Station
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Features:
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CG-196 Probe Station Applications:
1. Cryogenics:
Because the wafer is probed at the cryogenics temperature, moisture will form and then freeze on the wafer. This moisture will result in electrical leakage which causes a measurement failure. With the CG-196 Probe Station, the moisture in the chamber is removed by the vacuum pump which has to be kept running for the duration of the measurements.
2. High Temperature, Oxygen-Free:
When the wafer is heated to 300 degrees C, 400 degrees C, 500 degrees C and higher, significant oxidation will occur. The higher the temperature, the greater the oxidation of the wafer surface.The oxidation will make the wafer degrade electrically, physically & mechanically. With the CG-196, the oxygen in the chamber is removed by the vacuum pump which must be kept running throughout the measurement cycle.
Because the chuck will be controlled thermally for both the cryogenics and high temperature applications, the probed tip on the wafer will shift somewhat as a result of the wafer shrinkage and expansion. This results in some of the tips have\ing to be re-positioned by the micropositioner using the control knobs, X-Y-Z, ouside the vacuum chamber. Alternatively, the motorized micropositioner with the joystick control panel outside can easiuly re-position the tip in the chamber.
Specifications:
- Chuck : 400mm dia
- Temperature range 77 degrees K - 480 degrees K
- Temperature resolution: 0.1 degrees K
- Liquid nitrogen dewar: 50 litre
- Micropositioner travel, X-Y-Z linear: 22mm x 25mm x 25mm, resolution 10 micron
- Microscope X-Y stage: 1" x 1"
- Zoom: 0.7X~4.5X
- Eyepiece: 20X
- Total maginification: 14X~90X
- Light box: 150w, stepless control
- Dual gooseneck fibre optic guide
- Leveling leg, 4 sets
SR-4 4-Point Probe Stand (for Sheet Resistivity Measurements)
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Features:
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SR-4 Applications:
- Sheet Resistivity
- Slice Resistivity
- Doping Quality
- Metalization Thickness
- P/N Typing
- V/I Measurement
Specifications:
- Chuck: 4", 6", 8" dia. teflon
- Head up/down movement: 10mm
- Probing Z resolution: 1 Micron
- Probe pin material: tungsten carbide
- Probe pin spacing: 40 mil, 50 mil, 62.5 mil
- Probe pin spring: 45grams, 85grams, 180grams
- Probe pin radius: 40.6 micron
Other Probe Stations
* LCD (Large Sized Substrate) Probe Station
* Hall-Effect Probe Station
Contact us for more information
Micropositioners
We can supply our micropositioners to fit any model of any brand of probe station & usually improve its performance - call us to discuss your requirements!
EB-700 I/O Pad Electro-optics Micropositioner
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Features:
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Specifications:
- X-Y-Z positioning range: 12mm x 12mm x 12mm, Linear motion
- Lead screw thread count: 40 TPI
- Resolution: 1.7 micron
EB-050 Circuit / RF Micropositioner
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Features:
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Specifications:
- X-Y-Z positioning range: 12mm x 12mm x 12mm, Linear motion
Lead screw thread count: 80 TPI
Resolution: 0.8 micron
EB-005 Sub-micron / RF Micropositioner
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Features:
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Specifications:
- X-Y-Z positioning range: 12mm x 12mm x 12mm, Linear motion
- Lead screw thread count: 200 TPI
- Resolution: 0.35 micron
Accessories
Probing solutions require not only probe stations and micropositioners but, in fact, a full range of accessories to build each customised solution. |
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For further information, Contact Us at Vicom to speak to one of our technical specialists