Probing Solutions

Your source for probing solutions

Wherever, Whatever, Better by Design!

As a global supplier of probing solutions, EverBeing provides a complete range of probing hardware from A to Z. In partnership with Vicom, we are your one-stop shop for probing solutions!

We have complete probe stations, as well as semi-finished parts in stock at the factory. In addition, we have one of the widest range of probing systems accessories available including probing tips, tip holders, extension cables, triaxial/RF heads/adapters, micropositioners and microscopes. As a result, as soon as a customer order is received, EverBeing can rapidly configure, assemble and ship that order to Vicom and on to you.

With over 25 years experience, EverBeing and Vicom consultants cost-effectively materialize your idea. If you are unable to find the proper items from our standard product line, we will gladly tailor to your specific needs. In addition, we offer upgrades and services for existing probe stations of any brand and model.

Probe Stations

BD Series Analytical Probe Stations

Features: Large knob chuck stage RF probing field upgradeable 20X ~ 4000X magnification Backlash-free movement Platen linear quick up/down for easy load / unload of wafer Choice of microscope up / down tilt for E-Z revolving objectives

Specifications:

• Vacuum Chuck : see model table below
• Chuck Stage Travel: see model table below
• Chuck Theta : 0~30 degrees
• Platen Up/ Down Coarse Adjustment : 6mm Adjustable Lever-Driven
• Platen Up/Down Fine Adjustment: 25 mm Adjustable Hand Wheel-Driven
• Platen: 12 Micropositioners
• Microscope Stage: 1" x1" Travel

EB Series Analytical Probe Stations

Features: Coaxial driven chuck stage RF probing field upgradeable 20X ~ 4000X magnification Backlash-free movement Choice of microscope up / down tilt for E-Z revolving objectives

Specifications:

• Vacuum Chuck : see model table below
• Chuck Stage Travel: see model table below
• Chuck Theta : 0~30 degrees
• Chuck Up/Down: 4 mm Adjustable
• Platen: 12 Micropositioners
• Microscope Stage: 1" x1" Travel

C-2 Mini Probe Station

Features: Compact size & light weight Affordable Coaxial driven chuck stage Electro-optics applications - light intensity / wavelength Measurement for LED / LD / PD  RF Probing East-West

View Datasheet

C-2-RF Mini Probe Station

Introducing the worlds smallest, yet reliable RF probe station. This versatile 2” probe station for RF measurements with convenience features built in is capable of full four-port measurements with two DC biasing positioners.

Features: Most Cost Effective Affordable RF probe station 26 kg Weight Share instruments if they’re not accessible in your lab! Equipped with 150x optical zoom digital microscope (photo and video capabilities) Lightest with full functions 360 mm x 330 mm Footprint Place in glove box for dry or oxygen free environment. Allow hot/cold chuck -60?C to 200?C Place on top of an optical table Integrated Vibration Isolator Versatile Measurements One-off testing separate from production testing Capable up to 4-port measurements @ 70 GHz testing with 2 DC biasing 1 μm resolution X-Y-Z linear motion micropositioners with magnet on/off switch Special Features U-Chuck holds DUT and calibration substrate simultaneously with individual vacuum switches Quick Chuck Y-axis slide pin for easy wafer loading Quick Chuck Z-axis for contact place and release

Specifications:

• Vacuum Chuck : 2" stainless steel
• Chuck Stage Travel: 2" x 2"
• Resolution: 10 micron
• Chuck Theta : 0~30 degrees

View Datasheet

PE-4 Mini Probe Station

Features: Coaxial driven chuck stage RF probing field upgradeable 20X ~ 4000X magnification Backlash-free movement Choice of microscope up / down tilt for E-Z revolving objectives

Specifications:

• Vacuum Chuck : 4" stainless steel
• Chuck Stage Travel: 3" x 3"
• Chuck Theta : 0~30 degrees
• Platen: 6 Micropositioners

View Datasheet

CG-196 Cryogenics (& High Temperature, Oxygen Free) Probe Station

Features: Rugged structure with all-welded frame Tip repositioning using external micropositioner Bridged frame microscope with easily opening chamber Precise microscope X-Y movement Up to 6 micropositioners at one time Optional 10pA leakage level Optional vibration-free table Optional high vacuum chamber

CG-196 Probe Station Applications:

1. Cryogenics:

Because the wafer is probed at the cryogenics temperature, moisture will form and then freeze on the wafer. This moisture will result in electrical leakage which causes a measurement failure. With the CG-196 Probe Station, the moisture in the chamber is removed by the vacuum pump which has to be kept running for the duration of the measurements.

2. High Temperature, Oxygen-Free:

When the wafer is heated to 300 degrees C, 400 degrees C, 500 degrees C and higher, significant oxidation will occur. The higher the temperature, the greater the oxidation of the wafer surface.The oxidation will make the wafer degrade electrically, physically & mechanically. With the CG-196, the oxygen in the chamber is removed by the vacuum pump which must be kept running throughout the measurement cycle.

Because the chuck will be controlled thermally for both the cryogenics and high temperature applications, the probed tip on the wafer will shift somewhat as a result of the wafer shrinkage and expansion. This results in some of the tips have\ing to be re-positioned by the micropositioner using the control knobs, X-Y-Z, ouside the vacuum chamber. Alternatively, the motorized micropositioner with the joystick control panel outside can easiuly re-position the tip in the chamber.

Specifications:

• Chuck : 400mm dia
• Temperature range 77 degrees K - 480 degrees K
• Temperature resolution: 0.1 degrees K
• Liquid nitrogen dewar: 50 litre
• Micropositioner travel, X-Y-Z linear: 22mm x 25mm x 25mm, resolution 10 micron
• Microscope X-Y stage: 1" x 1"
  • Zoom: 0.7X~4.5X
  • Eyepiece: 20X
  • Total maginification: 14X~90X
  • Light box: 150w, stepless control
  • Dual gooseneck fibre optic guide
  • Leveling leg, 4 sets

View Datasheet

SR-4 4-Point Probe Stand (for Sheet Resistivity Measurements)

Features: True vertical up / down Individual contact spring-loaded pin Constant pin spacing Ultimate repeatability Probe head easy changeover Probing Z position adjustable from top Sturdy feedthrough rear panel Feedthrough connector choice of banana / BNC / Triaxial Chuck quick move available Hot chuck available Shielding box available 3rd-party probe heads available

SR-4 Applications:

• Sheet Resistivity
• Slice Resistivity
• Doping Quality
• Metalization Thickness
• P/N Typing
• V/I Measurement

Specifications:

• Chuck: 4", 6", 8" dia. teflon
• Head up/down movement: 10mm
• Probing Z resolution: 1 Micron
• Probe pin material: tungsten carbide
• Probe pin spacing: 40 mil, 50 mil, 62.5 mil
• Probe pin spring: 45grams, 85grams, 180grams
• Probe pin radius: 40.6 micron

View Datasheet

Other Probe Stations

* LCD (Large Sized Substrate) Probe Station

* Hall-Effect Probe Station

Contact us for more information

Micropositioners

We can supply our micropositioners to fit any model of any brand of probe station & usually improve its performance - call us to discuss your requirements!

EB-700 I/O Pad Electro-optics Micropositioner

Features: Budget-priced and affordable Linear motion I/O pad probing Electro-optics probing Space saving Choice of triaxial / coaxial tip holders

Specifications:

• X-Y-Z positioning range: 12mm x 12mm x 12mm, Linear motion
• Lead screw thread count: 40 TPI
• Resolution: 1.7 micron

View Datasheet

EB-050 Circuit / RF Micropositioner

Features: Linear motion I/O pad probing Circuit probing RF probing Space saving, in-line X-Y Knob Choice of triaxial / coaxial tip holders

Specifications:

• X-Y-Z positioning range: 12mm x 12mm x 12mm, Linear motion
  Lead screw thread count: 80 TPI
  Resolution: 0.8 micron

View Datasheet

EB-005 Sub-micron / RF Micropositioner

Features: Sub-micron internal circuit probing Linear motion Backlash-free movement Choice Of triaxial / coaxial tip holders Four-sided RF probe positioner East/West/South/North DC to 40GHz ~ 120GHz Multi-contact wedge DC to 40GHz or 67GHz Calibration substrate with software 45 degree cable connection no need for elbow connector 30 degree E-Z probing inclination Repairable probe head Tungsten tip available Positioner with cable holder

Specifications:

• X-Y-Z positioning range: 12mm x 12mm x 12mm, Linear motion
• Lead screw thread count: 200 TPI
• Resolution: 0.35 micron

View Datasheet

Accessories

Probing solutions require not only probe stations and micropositioners but, in fact, a full range of accessories to build each customised solution.

For further information, Contact Us at Vicom to speak to one of our technical specialists